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  • NORDSON MARCH AP-1000Plasma System
    • 概述
    • 參數
    • 應用范圍
    • 資料
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      Nordson AP-1000 Plasma System Features:


      PLC controller with touch screen provides an intuitive graphical interface and 

      real time process representation

      Flexible shelf architecture allows processing of a wide variety of part carriers in either direct or 

      downstream plasma mode

      13.56 MHz RF generator has automatic impedance matching for unparalleled process reproducibility

      Proprietary software control system generates process and production data for statistical process control


      Nordson AP-1000 Plasma System Benefits:


      Uniform plasma treatment for the most demanding production environments

      The Nordson MARCH AP-1000 system is designed to meet the rigorous demands of 24-hour operation in high performance manufacturing environments. The system delivers uniform plasma treatment with unmatched reliability, safety and ease of operation.

      The AP-1000 system is completely self-contained, requiring minimal floor space. The pump, chamber, control electronics, and 13.56 MHz RF generator are housed in a single enclosure. Full front access allows for convenient access to all interior components. The pump is positioned on rollers for easy removal.

      The plasma chamber is constructed of 11-gauge stainless steel with aluminum fixtures for superior durability. The chamber has multiple removable and adjustable shelves to accommodate a range of part carriers, including magazines, trays, wafer and Auer? boats.


      Enhanced productivity for high-volume capacity requirements 

      The AP-1000 system with optional HTP (high throughput) shelves combines the reliability and process quality of the AP-1000 system with the proven benefits of Nordson MARCH’s unique shelf design. The AP- 1000 HTP system optimizes use of the reactive ions found in RF plasma, increasing treatment uniformity while decreasing process time. 

      The AP-1000 HTP system allows selection from a range of process gases such as Argon, Hydrogen and Helium. It comes standard equipped with four mass flow controllers for optimal gas control. Slotted magazines are placed vertically inside the chamber. 

      Additionally, slotted magazines can be placed vertically inside the chamber. Typically, each magazine holds a minimum of 20 lead frames. The AP-1000 plasma chamber can hold up to 12 magazines, depending on magazine size.


      Nordson AP-1000 Plasma System Specifications:


      Enclosure

      Dimensions

      W x D x H – Footprint

      680W x 1127D x 1890H

      (26.77W x 62.3D x 74.4H in.)

      Net Weight

      485 kg (1069 lbs)

      Equipment Clearance

      Right, Left – 153 mm (6 in.), Front-680 mm 

      (27 in.) Back-483 mm (19 in.) min.

      Chamber

      Maximum Volume

      127 liters (7774 in3)

      Variable Electrode

      Configurations

      Power-Ground, Ground-Power, Power-Power

      Number of Electrode Positions

      14

      Electrode Pitch

      25.4 mm (1 in.) for 600 W

      50.8 mm (2 in.) for 1000 W

      Electrodes

      Powered Working Area

      349W x 425D mm (13.74W x 16.73D in.)

      Ground/Perforated 

      Working Area

      384W x 425D mm (15.12W x 16.73D in.)

      Floating Working Area

      349W x 425D mm (13.74W x 16.73D in.)

      RF Power

      Standard Wattage

      600 W

      Optional Wattage

      1000 W

      Frequency

      13.56 MHz

      Gas Control

      Available Flow Volumes

      10, 25, 50, 100, 250, 500, 1000, 2000 or 

      5000 sccm

      Maximum Number of MFCs

      4

      Control &Interface

      Software Control

      PLC Control with Touch Screen Interface

      Remote Interface

      PlasmaLINK, ProcessLINK, SECS/GEM

      Vacuum Pump

      Standard Wet Pump

      53 cfm with Oxygen Oil Mist Eliminator

      Optional Wet Pump

      53 cfm with Corrosive Oil Mist Eliminator

      Optional Purged Dry Pump

      63 cfm

      N2 Purged Pump Flow

      14 slm

      Cooling Water 

      Purged Pump Flow

      5 slm

      Facilities

      Power Supply

      220 V, 25 A, 50/60 Hz, 3-Phase, 

      8 AWG, 4-Wire;380 V, 25 A, 50/60 Hz, 3-Phase,

      8 AWG, 5-Wire

      Process Gas 

      Fitting Size & Type

      6.35 mm (0.25 in.) OD Swagelok Tube

      Process Gas Purity

      Lab or Electronic Grade

      Process Gas Pressure

      0.69 bar (10 psig) min. to 1.03 bar 

      (15 psig) max., regulated

      Purge Gas Fitting Size & Type

      6.35 mm (0.25 in.) OD Swagelok Tube

      Purge Gas Purity

      Lab or Electronic Grade N2/CDA

      Purge Gas Pressure

      2 bar (30 psig) min. to 6.9 bar 

      (100 psig) max., regulated

      Pneumatic Valves 

      Fitting Size & Type

      6.35 mm (0.25 in.) OD Swagelok Tube

      Pneumatic Gas Purity

      CDA, Oil Free, Dewpoint ≤7°C(45°F),

      Particulate Size<5 μm

      Pneumatic Gas Pressure

      3.45 bar (50 psig) min. to 6.89 bar 

      (100 psig) max.,regulated

      Exhaust

      38 mm (1.5 in.) OD Pipe Flange

      Compliance

      SEMI

      S2/S8 (EH&S/Ergonomics)

      International

      CE Marked

      Ancillary

      Equipment

      Gas Generators

      Nitrogen, Hydrogen

      (Requires Additional Non-Optional Hardware)

      Facilities

      Chiller, Scrubber




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